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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
534 pages, Illustrations
Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
Publicado | 16 de noviembre de 2007 |
ISBN13 | 9780470727300 |
Editores | John Wiley & Sons Inc |
Páginas | 544 |
Dimensiones | 247 × 174 × 29 mm · 916 g |
Lengua | English |
Ver todo de Mack, Chris (Lithoguru.com) ( Ej. Paperback Book y Hardcover Book )