Semiconductor Micromachining: Techniques and Industrial Applications - S a Campbell - Libros - John Wiley & Sons Inc - 9780471966821 - 8 de mayo de 1998
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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition

S a Campbell

Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition

A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.


406 pages, 141 illustrations, 34 graphs, 18 tables

Medios de comunicación Libros     Hardcover Book   (Libro con lomo y cubierta duros)
Publicado 8 de mayo de 1998
ISBN13 9780471966821
Editores John Wiley & Sons Inc
Páginas 408
Dimensiones 163 × 237 × 29 mm   ·   775 g
Lengua English  
Editor Campbell, S. A.
Editor Lewerenz, H. J.