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Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology
Jagannathan Thirumalai
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Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology
Jagannathan Thirumalai
The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques.
134 pages
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 2 de mayo de 2018 |
| ISBN13 | 9781789230307 |
| Editores | IntechOpen |
| Páginas | 134 |
| Dimensiones | 251 × 176 × 17 mm · 406 g |
| Lengua | English |
| Editor | Thirumalai, Jagannathan |
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