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Design and Manufacturing of Active Microsystems - Microtechnology and MEMS Stephanus Buttgenbach 2011 edition
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Design and Manufacturing of Active Microsystems - Microtechnology and MEMS
Stephanus Buttgenbach
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
444 pages, biography
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 21 de marzo de 2014 |
| Fecha de lanzamiento original | 2013 |
| ISBN13 | 9783642267383 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 444 |
| Dimensiones | 155 × 235 × 24 mm · 635 g |
| Lengua | Alemán |
| Editor | Burisch, Arne |
| Editor | Buttgenbach, Stephanus |
| Editor | Hesselbach, Jurgen |
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