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![Cover for Nava Setter · Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology (Hardcover Book) [2005 edition] (2005)](https://imusic.b-cdn.net/images/item/original/109/9780387233109.jpg?nava-setter-2005-electroceramic-based-mems-fabrication-technology-and-applications-electronic-materials-science-technology-hardcover-book&class=scaled&v=1456156048)