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![Cover for Yves Pauleau · Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II (Paperback Book) [Softcover reprint of the original 1st ed. 2002 edition] (2002)](https://imusic.b-cdn.net/images/item/original/251/9781402005251.jpg?yves-pauleau-2002-chemical-physics-of-thin-film-deposition-processes-for-micro-and-nano-technologies-nato-science-series-ii-paperback-book&class=scaled&v=1451508806)
![Cover for Yves Pauleau · Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II (Hardcover Book) [2002 edition] (2002)](https://imusic.b-cdn.net/images/item/original/244/9781402005244.jpg?yves-pauleau-2002-chemical-physics-of-thin-film-deposition-processes-for-micro-and-nano-technologies-nato-science-series-ii-hardcover-book&class=scaled&v=1451508808)
